Published date: 2023-01-20 22:26:51
CAS number: 7783-61-1
Name: Silicon tetrafluoride
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Silicon tetrafluoride CAS 7783-61-1
is used in ion-implantation processes and as a precursor to fluorinated silica via plasma-assisted CVD. Mixtures of SiF4-SiH4-H2 have recently been used to deposit polycrystalline silicon thin films via remote plasma chemical vapor deposition (RPCVD). Such fluorinated thin films show visible photoluminescence (PL) at room temperature.
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Product Detail: Silicon tetrafluoride
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